METHOD OF MANUFACTURING DISPLAY DEVICE COMPRISING OXIDIZED POROUS SILICON MATERIAL-BASED ELECTRON EMISSION SOURCE

摘要

A method for manufacturing a display device comprising an oxidized porous silicon material-based electron emission source is provided to suppress contamination of an oxidized porous silicon layer in a bonding process by using an anodic bonding method. A first panel(20) and a second panel(60) are prepared. Each of the first and second panels includes sodium oxide. An oxidized porous silicon material-based electron emission source(40) is formed on the first panel. A silicon spacer(50) for surrounding the oxidized porous silicon material-based electron emission source is formed on the first panel by depositing silicon on the first panel. The second panel is attached to the silicon spacer by using an anodic bonding method so that the first and second panels are positioned opposite to each other. The first and second panels are formed of a glass material or a plastic material having the same thermal expansion coefficient as a thermal expansion coefficient of the silicon.