FET BASED SENSOR FOR DETECTING IONIC MATERIAL, DEVICE FOR DETECTING IONIC MATERIAL COMPRISING THE SAME, AND METHOD FOR DETECTING IONIC MATERIAL USING THE FET BASED SENSOR

摘要

Provided are a FET-based sensor for ionic material detection, an ionic material detecting apparatus including the FET-based sensor, and a method of detecting an ionic material using the FET-based sensor. The FET-based sensor includes: a sensing chamber including a reference electrode and a plurality of sensing FETs; and a reference chamber including a reference electrode and a plurality of reference FETs. Signals from a target biomolecule can be sharply separated from noise, such as a drift signal spontaneously generated due to a reaction in the surface of the gate electrode and a signal generated due to the pressure applied when injecting a solution. The FET-based sensor has high sensitivity, and thus can be used to detect a low-concentration ionic material, even a biomolecule, such as a nucleic acid or protein, with improved robustness to noise.