PREPARATION OF HIGH PURITY TUNGSTEN HEXAFLUORIDE

摘要

The present invention relates to a method for producing a high purity tungsten hexafluoride (WF ₆ ) relates , metal tungsten (W) and fluorine (F ₂ ), nitrogen trifluoride (NF ₃ ) , or a mixture thereof by reacting tungsten hexafluoride (WF ₆ ) and a process for producing , as the metal tungsten is used the oxygen content of 500 to 5000 ppm , and which is characterized by using the oxygen content is not more than 1000 ppm as the fluorine and nitrogen trifluoride, According to the method of the present invention , a high-purity tungsten hexafluoride containing a very small amount of metal impurities of less than 100 ppb can be efficiently produced .