METHOD AND APPARATUS FOR THE PRODUCTION OF HIGH PURITY TUNGSTEN HEXAFLUORIDE

摘要

The present Invention provides new and useful apparatus and methods for purifying WF6 gas, and In particular, provides apparatus and methods of using carbonaceous materials to produce high purity WF6by removing substantially all the high volatility gas impurities and troublesome transition metal impurities The present invention is particularly useful for removing chromium and molybdenum impurities from WF6 gas.;COPYRIGHT KIPO & WIPO 2010