TUNGSTEN HEXAFLUORIDE PRODUCTION METHOD, REFINING METHOD FOR SAME, AND TUNGSTEN HEXAFLUORIDE

摘要

The tungsten hexafluoride production method of the present invention comprises: a reaction step in which tungsten and a fluorine-element-containing compound gas are reacted, and a mixture containing tungsten hexafluoride and impurities including hydrogen fluoride is obtained; and a discharge step in which the mixture is distilled, and during distillation, a discharge operation in which an accumulation operation and a purging operation are alternately implemented is performed at least two or more times to thereby obtain tungsten hexafluoride.