Method of refining tungsten hexafluoride containing molybdenum hexafluoride as an impurity

摘要

A method of refining tungsten hexafluoride containing molybdenum hexafluoride as an impurity includes the step of contacting the tungsten hexafluoride with at least one metal selected from the group consisting of Mo, W, Cu, Ni, Fe, Co, Zn, Ti, Al, Ca and Mg at a temperature ranging from 100° to 500° C. Molybdenum hexafluoride is efficiently removed from the tungsten hexafluoride by the method.