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METHOD AND APPARATUS FOR THE PRODUCTION OF HIGH PURITY TUNGSTEN HEXAFLUORIDE
METHOD AND APPARATUS FOR THE PRODUCTION OF HIGH PURITY TUNGSTEN HEXAFLUORIDE
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机译:生产高纯度六氟化钨的方法和装置
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摘要
The present Invention provides new and useful apparatus and methods for purifying WF6 gas, and In particular, provides apparatus and methods of using carbonaceous materials to produce high purity WF6by removing substantially all the high volatility gas impurities and troublesome transition metal impurities The present invention is particularly useful for removing chromium and molybdenum impurities from WF6 gas.
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