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Method for enabling conventional wire bonding to copper-based bond pad features

机译:用于将常规引线键合到铜基焊盘特征的方法

摘要

A method is described comprising removing an oxide from a surface and then commencing application of a passivation layer to the surface within 5 seconds of the oxide removal. The surface may be a copper surface which may further comprise a bonding pad surface. Removing the oxide may further comprise applying a solution comprising citric acid or hydrochloric acid. Applying the passivation layer may further comprise applying a solution comprising a member of the azole family where the azole family member may further comprise BTA. The method may also further comprise completely applying the passivation layer 35 seconds after commencing its application.
机译:描述了一种方法,该方法包括从表面去除氧化物,然后在去除氧化物的5秒内开始将钝化层施加到表面。该表面可以是铜表面,该铜表面可以进一步包括焊盘表面。去除氧化物可以进一步包括施加包含柠檬酸或盐酸的溶液。施加钝化层可以进一步包括施加包含唑家族的成员的溶液,其中唑家族的成员可以进一步包含BTA。该方法还可包括在开始施加钝化层35秒之后完全施加钝化层。

著录项

  • 公开/公告号KR100731851B1

    专利类型

  • 公开/公告日2007-06-25

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20017012365

  • 发明设计人 리휴;히메스다이안제이.;

    申请日2001-09-27

  • 分类号H01L21/60;

  • 国家 KR

  • 入库时间 2022-08-21 20:31:54

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