首页> 外国专利> Wafer Transfer having Structure for Mapping Wafer and Method for Mapping Wafer loaded in Boat thereof

Wafer Transfer having Structure for Mapping Wafer and Method for Mapping Wafer loaded in Boat thereof

机译:具有用于测绘晶圆的结构的晶圆转移及其在船上装载的用于测绘晶圆的方法

摘要

A wafer transfer with a structure for mapping a wafer and a method for mapping the wafer loaded in a boat using the same are provided to reduce an apparatus size and to simplify an apparatus structure by detecting a wafer loading state of the boat using a conventional wafer transfer without an additional apparatus. A wafer transfer includes a head, a horizontal transfer unit, a spin driving unit, a vertical driving unit, a sensing unit, and a control unit. The head(10) includes fingers vertically spaced apart from each other. The horizontal transfer unit(20) is connected with the head in order to freely move the head on X-Y plane. The spin driving unit(30) is connected with the horizontal transfer unit in order to rotate the horizontal transfer unit on the X-Y plane. The vertical driving unit(40) is connected with the spin driving unit in order to move the spin driving unit up and down in a Z-axis direction. The vertical driving unit includes a detecting part capable of detecting the height of the spin driving unit. The sensing unit is installed at one end of one finger in order to detect a wafer loading state of a boat. The control unit is used for controlling a detection point of the sensing unit and determining a detection end point of the sensing unit.
机译:提供一种具有用于映射晶片的结构的晶片传送器以及使用该晶片传送器映射用于装载在舟皿中的晶片的方法,以通过使用常规晶片来检测舟皿的晶片装载状态来减小装置尺寸并简化装置结构。无需其他设备即可进行传输。晶片传送装置包括头,水平传送单元,旋转驱动单元,垂直驱动单元,感测单元和控制单元。头部(10)包括彼此垂直间隔开的手指。水平传送单元(20)与头部连接,以便在X-Y平面上自由移动头部。自旋驱动单元(30)与水平传送单元连接,以便在X-Y平面上旋转水平传送单元。垂直驱动单元(40)与旋转驱动单元连接,以使旋转驱动单元在Z轴方向上上下移动。垂直驱动单元包括能够检测旋转驱动单元的高度的检测部分。感测单元安装在一个手指的一端,以检测舟皿的晶片装载状态。控制单元用于控制感测单元的检测点并确定感测单元的检测终点。

著录项

  • 公开/公告号KR100754771B1

    专利类型

  • 公开/公告日2007-09-03

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20050130910

  • 发明设计人 최창환;최태식;김병조;이경식;

    申请日2005-12-27

  • 分类号H01L21/68;

  • 国家 KR

  • 入库时间 2022-08-21 20:31:24

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