KNIFE EDGE RING AND SEMICONDUCTOR DEVELOP EQUIPMENT HAVING THE SAME AND WAFER BACK-SIDE WASHING METHOD OF SEMICONDUCTOR DEVELOP EQUIPMENT

摘要

A knife edge ring apparatus is provided for use during semiconductor manufacturing which includes a ring-shaped body having an inner side wall, an outer side wall and a top surface having a predetermined width. A multi-staged inclined portion is formed in the outer side wall and a plurality of discharge holes penetrate the body. Each of the discharge holes have an inlet associated therewith positioned at the inclined portion. The knife edge ring allows developer and cleaning solution to be discharged away from the wafer. A method of cleaning the bottom surface of a semiconductor wafer is also provided which employs the use of the knife edge ring. Developer is supplied onto the top surface of a wafer. Spraying solution is sprayed onto the bottom surface of the wafer. The knife edge ring guides the developer and the cleaning solution remaining on the bottom surface of the wafer's edge along an inclined portion formed at an outer side wall of the knife edge ring and causes the developer and the cleaning solution to flow into a plurality of discharge holes.