Method for Preparing Metal Substituted Mesoporous Metal Oxide Thin Film Using Surfactant and Gas Sensor Employing the Same

摘要

The present invention relates to a method for producing a metal-substituted mesoporous metal oxide thin film using a surfactant, and a gas sensor employing the same. More specifically, (1) a non-noble metal salt in a solution in which a surfactant is dissolved in ethanol and Adding and mixing a noble metal salt to prepare a complex metal chloride-ethanol precursor solution in a sol state; (2) coating the sol solution onto the surface of the substrate; And (3) heat treating the coated substrate to form a nanoporous crystalline composite metal oxide thin film having a uniform size, which is most closely filled, and a method for preparing a metal-substituted mesoporous metal oxide thin film using a surfactant, and It is about the gas sensor adopted.;According to the present invention, a noble metal / metal oxide thin film having a very large surface area and having a crystalline nanoporous structure can be manufactured to detect a gas with high sensitivity, and in particular, improve selectivity and sensitivity for CO, which is a reducing gas. Can be.;delete