CMOS (complementary metal oxide semiconductor) circuit arrangement has operating circuit region with decoder to address at least one of sensor and actuator elements, and evaluation and driver circuits for sensor and actuator elements

摘要

A sensor/actuator region is formed on and in a substrate. An operating circuit region has an address decoder for addressing at least one of the sensor and actuator elements, and evaluation and driver circuits for the sensor and actuator elements, respectively. The sensor/actuator region is arranged spatially separate from the operating circuit region. At least one of the sensor elements and the actuator elements, respectively, is electrically coupled to the operating circuit region. The evaluation circuit includes a voltage source, a current source, an amplifier unit, a switch unit, and a charge storage device. The addressing unit is formed as at least one of a shift register, a latch and a memory element. A counter electrode sets the electrical potential of an electrolyte that is to be applied to the circuit arrangement. A reference electrode detects the electrolyte potential and drives the counter electrode such that constant electrolyte potential is provided. Each sensor element comprises at least one switch element, a preamplifying unit, and selection logic.