Extreme ultraviolet radiation production device, has injection device positioned on discharge device, where injection device provides series of individual volumes of source materials, and is injected at distance to electrodes in area

摘要

The device has an energy beam source supplying energy radiation for preionization of source material serving for production of radiation and high voltage supply for production of high voltage impulse for electrodes (2,3). An injection device (10) provides a series of individual volumes of the materials, and is injected at a distance to electrodes in the area. An insulator is provided between the electrodes. An independent claim is also included for a method for production of extreme ultra violet radiation.