Method for the integration of functional nanostructures in micro - and nano electrical circuits

摘要

The present invention relates to a process for producing at least a nanostructure (9) on a substrate (17). It is intended in a particularly simple and effective manner long distances is bridged and branched structures are created. In this case, the generated nanostructure (9) is a multiple of the length of an individual object of nano have. The object is achieved by means of a multiplier electrodes structure (11), in which the projecting electrode areas electrode fingers (21), the ends facing away from the electrode (5) are arranged along a line in such a way that the electrode fingers (21) does not engage in one another and in which at least three electrodes (1; 13, 15) are formed. There is a dielectrophoretic depositing separate nano object accumulations (7) in each case along the line between the adjacent ends (5). In this way can be particularly advantageously be produced for a long nanostructures.