Micro Thermoforming of nanostructured polymer films: A new bonding method for the integration of nanostructures in 3-dimensional cavities

摘要

In this paper an approach will be presented to integrate selective nanostructured surfaces in 3-dimensional cavities. For this purpose, the technologies of nanoimprinting, micro thermoforming, and thermal bonding will be combined. In a first step the nanostructures are patterned onto the surface of polymer films by nanoimprinting. In a second step they are brought into a 3-dimensional form by micro thermoforming. During this micro thermoforming step, a thermal bonding process is accomplished in parallel. Geometrical modifications of the nanostructures due to the 3-dimensional stretching of the polymer film are measured, described, and compared with an analytical model.