Pressure or force sensor arrangement for use with e.g. pressure detection device, has piezoresistive measuring ranges comprising main extension direction on or in sensor unit, where direction forms specified angle with delimitation edges

摘要

The arrangement has a diaphragm (20), and a sensor unit (30) that is connected with the diaphragm. The sensor unit comprises several piezoresistive measuring ranges (40). The sensor unit comprises a rectangular or square delimitation with delimitation edges. The piezoresistive measuring ranges comprise a main extension direction on or in the sensor unit. The main extension direction forms an angle of 40 to 50 degrees with the edges. An independent claim is also included for a method for manufacturing a sensor arrangement.