首页> 外国专利> Metallic layer manufacturing method for manufacturing e.g. integrated circuit, involves implementing electroless wet-chemical precipitating process, and producing electrical field in electrolytic solution to precipitate metal

Metallic layer manufacturing method for manufacturing e.g. integrated circuit, involves implementing electroless wet-chemical precipitating process, and producing electrical field in electrolytic solution to precipitate metal

机译:用于例如制造金属层的方法集成电路,涉及实现化学湿法化学沉淀工艺,并在电解液中产生电场以沉淀金属

摘要

The method involves precipitating a metal over a structured layer of a semiconductor component (100) by applying an electrolytic solution and implementing an electroless wet-chemical precipitating process. An externally produced electrical field is produced in the electrolytic solution when the electrolytic solution is applied to precipitate the metal. A catalytic process is implemented at free-lying surface areas of a structured layer. A barrier layer (105) is provided with connections having cobalt, tungsten, phosphor, boron, nickel and molybdenum.
机译:该方法包括通过施加电解液并实施无电湿化学沉淀工艺在半导体部件(100)的结构化层上沉淀金属。当施加电解液以使金属沉淀时,在电解液中产生外部产生的电场。在结构化层的自由表面积上实施催化过程。阻挡层(105)设置有具有钴,钨,磷,硼,镍和钼的连接。

著录项

  • 公开/公告号DE102006001253A1

    专利类型

  • 公开/公告日2007-07-05

    原文格式PDF

  • 申请/专利权人 ADVANCED MICRO DEVICES INC.;

    申请/专利号DE20061001253

  • 发明设计人 NOPPER MARKUS;PREUSSE AXEL;WEHNER SUSANNE;

    申请日2006-01-10

  • 分类号H01L21/3205;H01L21/288;C23F17/00;

  • 国家 DE

  • 入库时间 2022-08-21 20:29:29

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