Wafer test unit has base plate with test circuit and groups of electrically conductive springs to contact the wafer

摘要

A wafer test unit (20) comprises a baseplate (30) with a test circuit and a group of electrically conductive springs across the width of the plate that are connected to the test circuit. Each spring presents an interface for a wafer test at the wafer test card. An independent claim is also included for a further test unit as above having measuring feelers at the spring ends.