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A reduced mask count process for the production of mixed voltage CMOS with high performance transistors and high reliability I / O transistors
A reduced mask count process for the production of mixed voltage CMOS with high performance transistors and high reliability I / O transistors
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机译:使用高性能晶体管和高可靠性I / O晶体管生产混合电压CMOS的掩模数量减少的工艺
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摘要
A mixed voltage CMOS process for high reliability and high performance core transistors and input-output transistors with reduced mask steps. A gate stack (30) is formed over the silicon substrate (10). Ion implantation is performed of a first species and a second species to produce the doping profiles (70, 80, 90, 100) in the input-output transistors. IMAGE IMAGE
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