SUBSTRATE TEMPERATURE DISPLAY DEVICE, REFLOW FURNACE COMPRISING THE SAME, AND SUBSTRATE TEMPERATURE CONFIRMING METHOD IN REFLOW FURNACE

摘要

PROBLEM TO BE SOLVED: To easily confirm whether the temperature of a substrate which is reflow-processed in a reflow furnace changes as designed.;SOLUTION: A substrate temperature display device is used for a reflow furnace in which a preheating zone, a heating zone, and a cooling zone are arranged along a transportation path. The device has a display part which displays temperature of a substrate passing each zone, at the time of passage, as graph using a temperature sensor attached to the substrate transported along the transportation path. A graph T of a set temperature profile of upper limit set value and lower limit set value of the substrate temperature in each zone where the substrate passes can be displayed on the display part. The graph T of temperature profile is so set as can be translated by a specified distance in the time axis direction by a graph slider I.;COPYRIGHT: (C)2008,JPO&INPIT