METAL PATTERN ARRAY USING HONEYCOMB-LIKE POROUS FILM AS MOLD

摘要

PROBLEM TO BE SOLVED: To provide a method for inexpensively and easily forming various kinds of metal pattern arrays in a small number of processes and the metal pattern array formed by the method.;SOLUTION: A metal is deposited in a hole of a honeycomb-like porous film formed by self-organization, then the metal is treated by an organic solvent, and the metal pattern array is obtained by removing the honeycomb-like porous film.;COPYRIGHT: (C)2008,JPO&INPIT