METHOD OF PURIFYING ORGANOSILICON COMPOSITION USED AS PRECURSOR IN CHEMICAL VAPOR DEPOSITION

摘要

PROBLEM TO BE SOLVED: To provide a method of purifying an organosilicon composition.;SOLUTION: The method of purifying an organosilicon composition containing an alkoxysilane or a carboxysilane and a basic impurity comprises the steps of contacting the organosilicon composition with an acid gas to form a precipitate comprising a salt of the acid gas upon reaction with the basic impurity and of removing the salt of the acid gas to form a purified organosilicon product.;COPYRIGHT: (C)2008,JPO&INPIT