ELECTRON BEAM HOLOGRAM, METHOD OF PRODUCING TRANSMISSION ELECTRON MICROSCOPE IMAGE, AND TRANSMISSION ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide an electron beam hologram, a method of producing a transmission electron microscope image and an electron transmission microscope, capable of preventing the positional misalignment of the transmission electron microscope image from the electron beam hologram.;SOLUTION: This transmission electron microscope can form an electron beam hologram H by a control device 17 by bringing an electron beam biprism 15 into a state in which interference is caused between an object wave E1 and a reference wave E2 by grounding an object wave side electrode 15a and a reference wave side electrode 15b and impressing positive potential V1 to a filament 15c. In addition, it is switched to a state in which the reference wave E2 and the object wave E1 overlaps each other by grounding the object wave side electrode 15a, impressing the positive potential V1 to the filament 15c, and impressing positive potential V2 higher than the potential V1 impressed to the filament 15c to the reference wave side electrode 15b, and thereby, a transmission electron microscope image T can be formed without having a positional shift from the electron beam hologram H.;COPYRIGHT: (C)2008,JPO&INPIT