SAMPLE PREPARATION METHOD FOR TRANSMISSION ELECTRON MICROSCOPE, SAMPLE SUPPORT STRUCTURE FOR THE TRANSMISSION ELECTRON MICROSCOPE, SAMPLE HOLDER AND CHARGED PARTICLE BEAM APPARATUS

摘要

PROBLEM TO BE SOLVED: To eliminate use of deposition, and improve the productivity in a preparation of a sample for a transmission electron microscope, when the thin sample which is processed and prepared by a charged particle beam is fixed to a sample holder.;SOLUTION: A sample preparation method for the transmission electron microscope is a method for fixing the thin sample W1, processed and prepared by the charged particle beam to the sample holder H1 having a holding member 50 for holding the thin sample and a recessed fitting section H1a, and comprises a thin sample preparing process for processing and preparing the thin sample, which has a section W1a to be fitted to the fitting section of the sample holder by the use of the charged particle beam; a thin sample holding process for holding the thin sample, prepared by the thin sample preparing process by the use of the holding member; and a thin sample fitting process for positioning the thin sample, held by the thin sample holding process relative to the sample holder, and fitting the to-be-fitted section of the thin sample to the fitting section of the sample holder.;COPYRIGHT: (C)2009,JPO&INPIT