MACRO LIGHTING SYSTEM FOR VISUAL INSPECTION APPARATUS, VISUAL INSPECTION APPARATUS, AND VISUAL INSPECTION METHOD OF GLASS SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a macro lighting system, a visual inspection apparatus, and a visual inspection method of a substrate capable of irradiating a substrate to be inspected at a uniform brightness with a plurality of light sources by adjusting the brightness of the illumination light emitted from the plurality of light sources.;SOLUTION: The macro lighting system comprises a plurality of light source units 4a and 4b for emitting the illumination light F. The light source units 4a and 4b have a light source 8 for emitting the illumination light F, and a dimming means 9 for adjusting light. With reference to the brightness of the illumination light F emitted from one of the plurality of light source units 4a and 4b, the dimming means 9 adjusts the brightness of the illumination light F emitted from the others of the light sources 4a and 4b to provide substantially equal brightness.;COPYRIGHT: (C)2008,JPO&INPIT