LASER HEAD, HEAD CHAMBER ACCOMMODATING THE LASER HEAD, AND SEMICONDUCTOR MANUFACTURING DEVICE EMPLOYING LASER LENGTH MEASUREMENT SYSTEM, OR SEMICONDUCTOR INSPECTING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a laser head achieving a laser length measurement system which performs highly accurate laser length measurement and is easy to disassemble and assemble for maintenance and inspection of a laser head housing.;SOLUTION: The laser head of the laser length measurement system includes a housing having inside a laser tube for emitting laser light. A fiber for dividing the laser light emitted from a laser tube and guiding it to the outside and a power cable for supplying electric power to the laser tube are provided respectively inside the housing. The housing is separately constituted of a plurality of members including barrel members and end members capable of joining the barrel members into a unified structure. The plurality of members for separately constituting the housing are assembled together via an airtight material on connecting surfaces of the members. An irradiation part for emitting the laser light outside is also mounted on a wall face of the members separately constituting the housing via the airtight material, and a transmitting material is mounted on an opening of the irradiation part via the airtight material.;COPYRIGHT: (C)2008,JPO&INPIT