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THICK COATING FILM-COATED MEMBER AND THICK COATING FILM-COATED MEMBER PRODUCTION METHOD
THICK COATING FILM-COATED MEMBER AND THICK COATING FILM-COATED MEMBER PRODUCTION METHOD
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机译:厚膜膜成员及厚膜膜成员的生产方法
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摘要
PROBLEM TO BE SOLVED: To provide a thick coating film-coated member in which even if a hard coating film is made thick, i.e., the thickness of the coating film T value is set to be in the range of 6 to 30 μm, compressive stress of the coating film is reduced, and the coating film provides excellent wear resistance and chipping resistance without deteriorating its adhesion to the member, and to provide a thick coating film-coated member production method.;SOLUTION: The hard coating film by physical vapor deposition is expressed by Mex(NyCzOv); wherein Me denotes two or more elements selected from the group 4a, 5a, 6a elements In the periodic table, Al, Si, B and S; x, y, z, v denote contents by atomic%; and, x+y+z+v=100, 0≤z≤10, 0≤v≤10 are satisfied. The crystal grains of a compound crystal-grown with the droplets of the hard coating film as starting points are projected to the surface of the coating film, and when the length in the longitudinal direction of the crystal grains of the compound is defined as h(μm), and the coating film thickness of the hard coating film is defined as T(μm), 6≤T≤30, and 0.1≤h/T≤1.2 are satisfied.;COPYRIGHT: (C)2008,JPO&INPIT
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机译:解决的问题:提供一种厚的涂膜被覆部件,其中即使将硬涂膜变厚,即涂膜的厚度T值被设置在6至30μm的范围内。 ,降低了涂膜的压应力,并且涂膜提供了优异的耐磨性和抗崩裂性,而不会降低其与部件的附着力,并提供了一种厚涂膜涂层的部件生产方法。物理气相沉积由Mex(NyCzOv)表示;其中,Me表示选自元素周期表中的4a,5a,6a族的2个以上元素,Al,Si,B和S。 x,y,z,v以原子%表示含量;并且,满足x + y + z + v = 100,0le; z≤ 10,0le; v≤ 10。以硬涂膜的液滴为起点结晶生长的化合物的晶粒投影到涂膜的表面,并且当将该化合物的晶粒在纵向上的长度定义为h( (μm),并且硬涂膜的涂膜厚度定义为T(μm),满足6leTlele 30和0.1leh / Tlele1.2。版权所有:(C)2008 ,JPO&INPIT
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