CALIBRATION DEVICE OF SEMICONDUCTOR TESTER AND MAINTENANCE METHOD OF CALIBRATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a calibration device capable of easily exchanging a pin for calibration in a short time.;SOLUTION: The calibration device 40 calibrating the semiconductor tester 100 includes: a calibration head 120 moving in a plane parallel to an arrangement surface of conductive pads and moving in a direction perpendicular to the arrangement surface of the conductive pads, for calibrating the semiconductor tester; a calibration metal pin 41 detachably mounted on the head and brought into contact with the conductive pad; a case 200 stationary with respect to a contact board during calibration of the semiconductor tester and accommodating the head and the metal pin; and a pin holder 400 including a holding part 420 for holding the metal pin and stationary with respect to the case, wherein the head is separated from the pin holder 400 to pull out the metal pin from the head in such a state that the holding part holds the metal pin.;COPYRIGHT: (C)2008,JPO&INPIT