Calibration device for the calibration of a tester channel of a tester device, the tester system and method for calibrating a tester channel

摘要

Calibration device (20, 30, 40) for the calibration of a tester channel (14) of a tester device (12), with the integrated components on a substrate wafer (1) for testing can be contacted with electrical signals,the calibration device (20, 30, 40) a coupling means and a flat contact carrier, with a first contact surface (2, 47) and a of the first contact surface (2, 47) isolated second contact surface (3, 49), the through the connecting means (5) are electrically connected to,the connecting device (5) is adapted to the first and second contact surface (2, 3, 47, 49) with the tester device (12) to connect,the first contact surface (2, 47) substantially from the second contact surface is surrounded, so that when one is connected to the tester device (12) is connected to the needle card (15) on the contact carrier of the calibration device (20, 30, 40) one of the contacting needles (16) of the needle card (15) which, with the tester channel anyway to be calibrated is connected to the first, the contact surface (2, 47) is placed..