Calibration device for the calibration of a tester channel of a tester device and a test system

摘要

One embodiment of the invention provides a calibration device for the calibration of a tester channel of a tester device to which integrated components on a substrate wafer can be contact-connected for testing with electrical signals. The calibration device includes a connecting device and a planar contact carrier with a first contact area and a second contact area insulated from the first contact area, which can be electrically connected via the connecting device, the connecting device being suitable for connecting the first and second contact areas to the tester device, the first contact area being generally surrounded by the second contact area, so that, when a needle card connected to the tester device is placed onto the contact carrier of the calibration device, one of the contact-connecting needles of the needle card which is connected to the tester channel to be calibrated is placed onto the first contact area and a plurality or all of the further contact-connecting needles of the needle card at tester channels that are not to be calibrated are placed onto the second contact area.