LASER DEVICE, EXCIMER LASER DEVICE, LIGHT IRRADIATION DEVICE, EXPOSURE DEVICE, LIGHT GENERATION METHOD, LIGHT IRRADIATION METHOD, EXPOSURE METHOD, AND METHOD FOR MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a laser device that can stably emit a laser beam at a target wavelength.;SOLUTION: Since a wavelength conversion unit 160 has a set of wavelength conversion elements 167d, 167e disposed without mediating a multiplexing optical element such as a dichroic mirror therebetween in the last stage of the unit, it is not necessary to consider positioning of the multiplexing optical element or degradation of the multiplexing optical element due to irradiation with a laser beam. Consequently, even when power of laser beams L1 to L4 generated in a laser light source is increased, a laser beam at a target wavelength can be stably emitted from the wavelength conversion unit 160.;COPYRIGHT: (C)2008,JPO&INPIT