MAGNETORESISTIVE ELEMENT, AND MANUFACTURING METHOD OF MAGNETORESISTIVE ELEMENT AND MANUFACTURING APPARATUS OF MAGNETORESISTIVE ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a magnetoresistive element for improved in stability in magnetic characteristics by suppressing thermal damage to a free ferromagnetic layer, to provide a manufacturing method of the magnetoresistive element, and to provide a manufacturing apparatus of the magnetoresistive element.;SOLUTION: A diffusion barrier layer formation process (step S6) is performed after a free layer formation process (step S5), and an oxide layer (diffusion barrier layer) is formed only on the surface of the free ferromagnetic layer by oxidizing an oxygen radical. Then, a protective layer formation process (step S7) is performed after the diffusion barrier layer formation process (step S6), and a protective layer is laminated on the diffusion barrier layer.;COPYRIGHT: (C)2008,JPO&INPIT