METHOD AND APPARATUS FOR MANUFACTURING MAGNETORESISTIVE ELEMENT, SOFTWARE AND SYSTEM FOR CONTROLLING MANUFACTURING OF MAGNETORESISTIVE ELEMENT, SOFTWARE FOR ESTIMATING RESISTANCE VALUE OF MAGNETORESISTIVE ELEMENT, AND COMPUTER SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a method and device for manufacturing a magnetic resistance effect element for reducing the fluctuation of the magnetic resistance effect element or the fluctuation of the center of distribution, and a method and device for manufacturing a magnetic head.;SOLUTION: Before the start of grinding, wafer information including each kind of factor in a wafer stage which is likely to affect the final resistance value of an MR film is obtained, and an S value is calculated by using a statistical method from the information. During the process of grinding, working time information including each kind of factor in a grinding stage which is likely to affect the final resistance value of the MR film is obtained (a step S3), and a K value is calculated by using the statistical method from the information (S4) in a fixed cycle. Then, an MR resistance estimated value during the process of grinding is calculated form the S value and the K value, and when the MR resistance estimated value reaches a target resistance value (S7), the grinding work is stopped (S8).;COPYRIGHT: (C)2001,JPO