Back incident die solid state image sensor

摘要

PPROBLEM TO BE SOLVED: To prevent noise caused by the incidence of light to a charge reading section from being generated in a rear face incident type imaging device having a light detection section and the charge reading section. PSOLUTION: The rear face incident type imaging device for allowing incident light to be detected to enter from a rear side comprises: a silicon substrate having front and rear surfaces; a light detection section that is provided on the surface of the silicon substrate to detect the incident light as a charge; and the charge reading section that is provided on the surface of the silicon substrate for reading charge being detected by the light detection section as an electric signal. Further, rear face incident type imaging device comprises; a recess that is provided by etching the silicon substrate from a rear side while the rear surface of the recess has an opposite region that opposes the light detection section by pinching the silicon substrate having nearly a fixed film thickness; and a light shielding film for covering the rear side of the silicon substrate excluding the opposite region. PCOPYRIGHT: (C)2004,JPO