PROBLEM TO BE SOLVED: To provide a hand for a substrate transfer robot which can eliminate the need for decreasing the number of substrates accommodatable in a substrate accommodation cassette even when the substrates are deflected by their own weights, and also can be manufactured with a low cost and a simple structure.;SOLUTION: A hand 20 is used for a substrate transfer robot 10 which extracts or accommodates a plurality of substrates S arranged at a predetermined spacing in a substrate accommodation cassette. The hand 20 comprises a plate-like member 21 curved or bent in a direction perpendicular to a direction when the hand 20 is inserted in the cassette, and fixing members 14, 15 for mounting the plate-like member 21 at its base end to an arm 13 of the robot 10. The curving/bending direction of the plate-like member 21 coincides with the deflecting direction of the substrates S arranged in the cassette. A degree of the curvature/bending is set to be nearly equal to the deflection of the substrates S based on their own weights, or to be larger than the deflection of the substrates S based on their own weights, and so that the full thickness of the plate-like member 21 does not exceed the arrangement pitch of the substrates S of the cassette.;COPYRIGHT: (C)2008,JPO&INPIT
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