HIGH-PRECISION POSTURE CONTROL METHOD OF X-RAY MIRROR

摘要

PROBLEM TO BE SOLVED: To provide a high-precision posture control method of an X-ray mirror, capable of highly and precisely controlling the posture of an X-ray optical element or a X-ray mirror for condensing X rays ranging from hard X rays to soft X rays or changing the light path of X rays, in particular, capable of keeping the incident angle of the X-ray constant below an angle not larger than 1 μrad.;SOLUTION: A horizontal condensing mirror and a vertical condensing mirror 5 provided with a condensing face band 7 of an elliptical reflection surface with a light source O and a focusing point F are arranged alternately in a K-B mirror configuration. Fresnel mirrors are individually formed by a pair of flat reflection faces 9, 10 formed in the vicinity of the outgoing side ends and the incident side ends of the condensing face bands of the mirrors. Interference fringes 13 formed by the Fresnel mirrors of the condensing mirrors are individually monitored at positions free from influence of the condensing beam formed by the condensing face band to electrically detect the change of the interference fringes. A detection signal obtained by the above detection is used as a feedback signal for controlling the posture of the condensing mirror.;COPYRIGHT: (C)2008,JPO&INPIT