High-precision method of detecting motion straightness based on plane mirror interference

摘要

A high-precision method of detecting motion straightness was proposed based on the principle of plane mirror interference after analyzing the motion straightness error of a linear stage.Detection experiments were carried out and the motion straightness errors were separated by the linear regression method.Finally,linear measurement uncertainty of the detection method was estimated.The results showed that this detection method was simple and accurate,and was especially suitable for precision detection of motion straightness error in the small travel movement of ultra-precision machining.