Resolution treatment manner and resolution central processing unit null ethylene

摘要

PROBLEM TO BE SOLVED: To obtain a decomposition processing method and apparatus wherein an exhaust gas after decomposition process is not high in temperature, and an undecomposed ethylene oxide is not discharged outside a system even if the exhaust gas containing a high concentration ethylene oxide may flow into a decomposition processing means for some reason, when the exhaust gas containing ethylene oxide discharged from a sterilization device or the like is decomposed.;SOLUTION: The exhaust gas containing ethylene oxide is once introduced into a buffer section 21 where the concentration of ethylene oxide in the exhaust gas is reduced, the exhaust gas containing a low concentration ethylene oxide is sent to photocatalyst members such as titanium oxide capable of adsorbing ethylene oxide or to a decomposition section 31 provided with the photocatalyst member and a plasma device, and ethylene oxide is decomposed here. An adsorbent capable of adsorbing ethylene oxide such as zeolite and the plasma device may be also used for the decomposition treatment of the gas in the section 31.;COPYRIGHT: (C)2005,JPO&NCIPI