首页> 外国专利> Production manner of the ferroelectric component, the surface acoustic wave component, the ink jet head, the ink jet printer, the frequency filter, the process which forms the buffer formation which functioning is made

Production manner of the ferroelectric component, the surface acoustic wave component, the ink jet head, the ink jet printer, the frequency filter, the process which forms the buffer formation which functioning is made

机译:铁电体成分,表面声波成分,喷墨头,喷墨打印机,频率滤波器,形成起作用的缓冲层的工序的制造方式

摘要

A ferroelectric element manufacturing method includes the steps of forming a buffer layer, which also functions as a sacrificial layer, on a single crystal substrate, forming a ferroelectric film on the buffer layer, separating the ferroelectric film and the single crystal substrate, and arranging the ferroelectric film that was separated from the single crystal substrate on an optional substrate.
机译:铁电元件的制造方法包括以下步骤:在单晶基板上形成兼作牺牲层的缓冲层,在该缓冲层上形成铁电膜,将铁电膜与单晶基板分离,并进行配置。在可选基板上与单晶基板分离的铁电膜。

著录项

  • 公开/公告号JP4111032B2

    专利类型

  • 公开/公告日2008-07-02

    原文格式PDF

  • 申请/专利权人 セイコーエプソン株式会社;

    申请/专利号JP20030085760

  • 发明设计人 岩下 節也;樋口 天光;宮澤 弘;

    申请日2003-03-26

  • 分类号H01L41/22;H01L21/8246;H01L27/105;H01L41/09;H01L41/18;H03B5/30;H03H3/08;H03H9/25;H03H9/64;

  • 国家 JP

  • 入库时间 2022-08-21 20:18:53

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