A piezoelectric element, a piezoelectric actuator, a piezoelectric pump, ink jet recording head, ink jet printer, a surface acoustic wave device, a frequency filter, an oscillator, an electronic circuit, a thin film piezoelectric resonator, and electronics

摘要

PPROBLEM TO BE SOLVED: To provide a piezoelectric element having superior piezoelectric characteristics. PSOLUTION: The piezoelectric element comprises a substrate, a buffer layer 5 formed above the substrate, a piezoelectric film 6 formed above the buffer layer 5, and a barrier layer 8 formed above the piezoelectric film 6. The buffer layer 5 is formed of perovskite-type Pb((ZrSB1-a/SBTiSBa/SB)SB1-b/SBXSBb/SB)OSB3/SB, and the barrier layer 8 is formed of perovskite-type Pb((ZrSB1-c/SBTiSBc/SB)SB1-d/SBZSBd/SB)OSB3/SB, where X consists of at least two kinds selected among V, Nb, and Ta, Z consists of at least two kinds selected among V, Nb, and Ta, and 0.15a0.8, 0.05b0.4, 0.15c0.8, and 0.05d0.4. The piezoelectric film is formed of a perovskite-type relaxer material. PCOPYRIGHT: (C)2006,JPO&NCIPI