Integrated production type bay within the buffer Deriberi-stocker system of

摘要

(57) in the X-Z plane in the [Abstract] pods, a plurality of the inter-bay transport system, the process tool and various I / O port (102) and (104), arranged along the walls of the tool bay integrated production types, including (116) pair of shuttle that can be transported on their own between storage shelves (106) (integrated) bay buffer Deriberi-stocker system. Advantageously, the present invention, and the (102) so as to share a large storage Kenichi temporary storage area of ​​a single pod each process tool (102) as well share the transport mechanism of a single individual process tool incorporated collectively the tool bay (102) by the process tool. Thus, flexibility and reliability are improved, moreover controlled by software and hardware can be simplified. In addition, it may be disposed on the upper side of some or all of the process tool (102) in the tool bay (106) Storage shelves. By this arrangement, pod storage space a number of substantially obtained as compared to conventional tool bays.