Being the membrane device of the dielectric multilayer film for the optical component

摘要

PROBLEM TO BE SOLVED: To provide a film forming device of dielectric multilayered film capable of easily and efficiently performing production of many kinds in a small quantity. SOLUTION: The production of many kinds in a small quantity is easily and efficiently performed by holding different kinds of objects A, B, C to be film formed by plural holders 10, 11, 12 in a reaction chamber 2 and providing shutters 7, 8 each capable of individually controlling opening/closing in accordance with the objective thickness and the lamination pattern of a film forming material, 3, 4 for each object to be film formed between the objects to be film formed and the film forming materials to form many kinds of films at the same time.