Method for producing a low-dimensional quantum structure of the nano-scale, and manufacturing method of an integrated circuit using the manufacturing method

摘要

Is contacted with at least one of gas and liquid containing the elements constituting the low-dimensional quantum structure of the nano-scale, the present invention is irradiated with an electromagnetic wave to the catalyst, a catalyst to produce a low-dimensional quantum structure of the nano-scale And then it is a method for manufacturing a low-dimensional structures of nano-scale, which is characterized in that to produce a low-dimensional quantum structure of the nano-scale on the catalyst. Contacting the carbon source is vaporized and (6), the catalyst substrate (1) on (2), catalyst (2) electromagnetic production method of the present invention, the low-dimensional quantum structure of the nano-scale (7 by irradiating a), producing a single-wall carbon nanotubes catalyst substrate (1) on (2) above. Thus, it is possible to generate low-dimensional quantum structure of nanoscale regions any purpose.