Production method and elastic boundary wave device of elastic boundary wave device

摘要

Production method of the elastic boundary wave device whose frequency variation is little is offered. 1st - 3rd medium 1 - 3 is laminated with this order, 1st medium it is production method of the elastic boundary wave device where electrode 5 is arranged in boundary of 1 and 2nd medium 2, 1st medium 1 and 2nd medium 2 is laminated, by preparing the layered product where electrode 5 is arranged in boundary of 1st and 2nd medium 1,2, at the said layered product stage, you adjust the film thickness of 2nd medium 2 frequency or the surface acoustic wave and the false elastic boundary wave orSpeed of sound of the elastic boundary wave is adjusted, after the adjusting, speed of sound of 2nd medium and the elastic boundary wave and/or the 3rd medium 3 where the material differs is formed, production method of the elastic boundary wave device.