RECYCLING OF ELECTROCHEMICAL-MECHANICAL PLANARIZATION (ECMP) SLURRIES/ELECTROLYTES

摘要

A method, process and system for the recycling of electrochemical-mechanical planarization slurries/electrolytes as they are used in the back end of line of the semiconductor wafer manufacturing process is disclosed. The method, process and system includes with the removal of metal ions from slurries using ion exchange media and/or electrochemical deposition.