Glan-Thompson Type Broadband Polarizer Device for Use in the Deep Ultraviolet Spectral Range and Method of Its Manufacture

摘要

A broadband polarizer device of a Glan-Thompson type is described, as well as a method of manufacturing such device. Such parameters as a material of the polarizer prisms, the prisms' configuration and a glue material, are selected so as to ensure total internal reflection for the broadband input light, including DUV spectral range (from about 190 nm). The glue material is selected so as to be characterized by a dispersion profile matching that of the polarizer prisms' material for extraordinary and ordinary rays in the broadband spectral range. Different methods of manufacturing such broadband polarizer are described is disclosed.