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Linked periodic networks of alternating carbon and inorganic clusters for use as low dielectric constant materials
Linked periodic networks of alternating carbon and inorganic clusters for use as low dielectric constant materials
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机译:碳和无机簇交替的链接周期网络,用作低介电常数材料
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摘要
This disclosure relates generally to polymeric networks of fullerene compounds, to methods of preparing precursors for such networks, and to their subsequent use as low dielectric constant materials in microelectronic devices.
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