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MEMS scanning mirror with trenched surface and I-beam like cross-section for reducing inertia and deformation
MEMS scanning mirror with trenched surface and I-beam like cross-section for reducing inertia and deformation
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机译:MEMS扫描镜具有沟槽状表面和工字梁形横截面,可减少惯性和变形
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摘要
A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bottom surface for reflecting light. The mirror can include a top flange and a bottom flange joined by a web, wherein the top and the bottom flanges form the top and the bottom surfaces, respectively. The rotational comb teeth can have a tapered shape. Stationary comb teeth can be interdigitated with the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating voltage difference between the rotational and the stationary comb teeth can be used to oscillate or tune the mirror.
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