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Dual work-function metal gates

机译:双功能金属门

摘要

A semiconductor device having dual work-function structures, such as dual work-function gate electrodes of transistors. In the preferred embodiment in which NMOS and PMOS transistors are formed on a semiconductor device, the transistors are initially formed with a dummy gate electrode and a dummy dielectric layer. The dummy gate electrode and dummy dielectric layers are removed. A gate dielectric layer and a first electrode layer are formed. A nitridation process is performed on the NMOS transistor to reduce the work function of the gate electrode. A second electrode layer is then formed on the first electrode layer.
机译:具有双重功函数结构的半导体器件,例如晶体管的双重功函数栅电极。在其中在半导体器件上形成NMOS和PMOS晶体管的优选实施例中,晶体管最初形成有伪栅电极和伪介电层。去除伪栅电极和伪介电层。形成栅介电层和第一电极层。在NMOS晶体管上执行氮化工艺以减小栅电极的功函数。然后在第一电极层上形成第二电极层。

著录项

  • 公开/公告号US7381619B2

    专利类型

  • 公开/公告日2008-06-03

    原文格式PDF

  • 申请/专利权人 CHIH-HAO WANG;YU-SHEN LAI;

    申请/专利号US20040832679

  • 发明设计人 YU-SHEN LAI;CHIH-HAO WANG;

    申请日2004-04-27

  • 分类号H01L21/8238;

  • 国家 US

  • 入库时间 2022-08-21 20:10:20

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