Head electrode region for a reliable metal-to-metal contact micro-relay MEMS switch

摘要

A head electrode region for an electromechanical device is presented, comprising a first insulating layer having electrode region edges; and a head electrode, where the head electrode comprises a locking portion, with the locking portion surrounding the electrode region edges of the first insulating layer such that the head electrode is held fixed relative to the first insulating layer. The head electrode region can further comprise a top region residing above the first insulating layer and a contact region residing below the first insulator, the head electrode region further comprising a second insulating layer formed to cover at least a portion of the top region of the head electrode.